Valve Manifold Boxes

Key Product Features

• Options for Manual Valve or Automated Valve operation

• Designed to contain 110% equivalent liquid volume in case of leaks.

• Equipped with liquid leak detection and chemical delivery system supply interlock; options for low exhaust monitoring/interlock.

• Flexible to accept different communications signal from Fab tools, Chemical Delivery Systems, Facility and Factory LSS networks

Product Application and Capabilities

• Support Pilot Line, Fab start-ups and Tool qualification, Mid-volume to High volume production

• For high purity process chemicals, CMP slurry, CMP Cleaning

• Chemicals and Industrial grade chemicals

Facility Utility Requirements

• AC Power, CDA or N2

• Exhaust, Process Drain

• Factory communications connections for SCADA/FMCS/LSS monitoring