Portable Dispense Carts

Key Product Features

• Portable Dispense Carts for Process Chemicals and CMP Slurry

• CMP version - Pneumatic mixer for proper slurry agitation

• Runs on compressed dry air (CDA) or N2 for AODD Pump; no electric power needed

• Ease of operation; can be set up near Fab Tool

• Internal PFA wetted components; FM4910 PVC or PVDF  or SS cart body

Product Application and Capabilities

• Support R&D and experimental setup

• Support Fab start-ups and Tool qualification

• 
  

Facility Utility Requirements

• CDA or N2

• Exhaust, Process Drain