MicroSpense – Chemical Dispense Unit

Key Product Features

• Single drum or carboy as source container

• Barcode scanner for container hookup verification/IQC.

• High-purity AODD pumps for transfer and dispense (PTFE and PFA materials in the fluid path).

• Internal PFA wetted components; FM4910 PVC or PVDF  or SS cabinet.

• Single Day Tank (base unit: 100L; scalable to customer requirements).

Product Application and Capabilities

• Support R&D and experimental setup

• Support Pilot Line, Fab start-ups and Tool qualification, Mid-volume production

Facility Utility Requirements

• AC Power, CDA, N2

• Exhaust, Process Drain

• Factory communications connections for SCADA/FMCS/LSS monitoring