Chemical Waste Lift Station

Key Product Features

• AODD Pump(s) for fast evacuation of waste liquid from sump tank to designated Facility Waste drain connection.

• Internal Sump Tank for catchment of waste liquid; equipped with level sensors for liquid level monitoring.

• Sump Tank volume can be customized to suit Customer requirements

• Built-in drain pan with leak detection for redundant liquid leak catchment.

• Operator-friendly Control panel with visual and audible alarms

• Flexible to accept different communications signal from Fab tools, Chemical Delivery Systems, Facility and Factory LSS networks

Product Application and Capabilities

• Support Pilot Line, Fab start-ups and Tool qualification, Mid-volume to High volume production

• For high purity process chemicals, CMP slurry, CMP Cleaning Chemicals and Industrial grade chemicals

Facility Utility Requirements

• AC Power, CDA or N2

• Exhaust, applicable Chemical Drain

• Factory communications connections for SCADA/FMCS/LSS monitoring